Construction of 500 m² of cleanrooms ISO 7 and ISO 5 at an equipment manufacturer for the semiconductor industries.
Construction of cleanrooms in an existing building
Located in Espoo, Finland, BENEQ is in the field of semiconductors. It designs and manufactures machines for manufacturers using ALD technology. For its production (manufacturing and packaging) and for its testing and demonstration laboratories, VÊPRES built 500 m2 of cleanrooms ISO 7 and ISO 5.
Several challenges on this project
This project for BENEQ is one of the first major projects carried out in the export sector for the VÊPRES. Despite the language barrier, and because of the distance from the "base camp" in Grenoble, the teams had to look for and manage local partners. Compliance with Finland's own regulations was also a specific challenge for this project.
In addition, cleanrooms were to be located in an existing building dating from the 80s. The expected surfaces and the required levels (ISO 7 and ISO 5) required a great deal of ingenuity from the design office for the implementation of the technical areas and circulation.
Finally, the project took place during the "Covid period", which generated additional organisational and management constraints for logistics and staff.
"A solid and complete technical response, adapted to the complexity of our project."
Patrick RABINZOHN, Ph.D, Business Executive, semiconductor ALD at BENEQ
Realization of cleanrooms ISO 7 and ISO 5 at BENEQ in Finland.
The cleanrooms were delivered on an optimized timeframe
The teams of VÊPRES met all the challenges to deliver the cleanrooms in an optimised timeframe given the health crisis. The commissioning took place a week ahead of schedule, to the great satisfaction of the BENEQ teams (see testimonial below).
Services provided
- Independent metal structure (mezzanine for technical equipment).
- Resin-type flooring.
- Sandwich panel partitioning type cleanroom.
- Sandwich panel false ceiling type cleanroom and dry mesh.
- Fire shelters, including partitions and doors.
- Anti-static laboratory, including partitioning and flooring.
- Construction of airlocks with roll-up doors and servo control.
- Power outlets, lights and security lights.
- Room air treatment by FFUs and PIFFs.
- Production and distribution of cold water.
- Electricity and regulation.
- Commissioning, cleaning and validation.
VÊPRES would like to thank BENEQ and its teams for the trust placed in us and for the very warm welcome given to our project managers and technicians.
Cleanroom ISO 7
Equipment Entrance / Roll-Up Door
Cleanroom ISO 5
ESD Environment
Access cleanrooms
SAS personnel and SAS equipment
Technical area
Walkable ceiling / fresh air supply for the cleanroom
Cleanroom ISO 7
Area treated with self-contained filter boxes and floor resin
Facing the challenges
Despite the challenges related to the language barrier, the distance from their base in Grenoble and Finnish regulations, the team managed to successfully complete this project, one of the first major export projects for the VÊPRES. In addition, the project took place during the Covid-19 pandemic, resulting in additional constraints in terms of organisation and management. Despite this, VÊPRES delivered the cleanrooms a week early.
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