Construction of 500 m² of ISO 7 and ISO 5 cleanrooms for an equipment manufacturer in the semiconductor industry.
Construction of cleanrooms within an existing building.
Located in Espoo, Finland, BENEQ specializes in semiconductors. The company designs and manufactures machines for industrial clients utilizing ALD technology. For its production (manufacturing and packaging) and its testing and demonstration laboratories, VÊPRES constructed 500 m2 of ISO 7 and ISO 5 cleanrooms.
Multiple challenges inherent in this project
This project for BENEQ represents one of VÊPRES's first major international undertakings. Despite the language barrier and the distance from our Grenoble home base, the teams had to identify and manage local partners. Adhering to Finland's specific regulations also presented a unique challenge for this project.
Furthermore, the cleanrooms had to be integrated into an existing building dating from the 1980s. The required areas and specified cleanliness levels (ISO 7 and ISO 5) demanded considerable ingenuity from the design office for the layout of technical zones and circulation paths.
Furthermore, the project was carried out during the « Covid period, » which generated additional organizational and management constraints for logistics and personnel.
« A robust and comprehensive technical solution, tailored to the complexity of our project. »
Patrick RABINZOHN, Ph.D, Business Executive, semiconductor ALD at BENEQ
Construction of ISO 7 and ISO 5 cleanrooms at BENEQ in Finland.
The cleanrooms were delivered within optimized timelines
The VÊPRES teams overcame all challenges to deliver the cleanrooms within optimized timelines despite the health crisis. Commissioning occurred one week ahead of schedule, to the great satisfaction of the BENEQ teams (see testimonial below).
Services Provided
- Independent metal structure (mezzanine for technical equipment).
- Resin-type flooring.
- Partitioning with cleanroom-type sandwich panels.
- Suspended ceiling made of cleanroom-type sandwich panels and dry grid.
- Fire-rated airlock, including partitioning and doors.
- Antistatic laboratory, including partitioning and flooring.
- Installation of airlocks with roll-up doors and interlock systems.
- Power outlets, lighting, and emergency lighting.
- Air treatment for rooms via FFUs and PIFFs.
- Chilled Water Production and Distribution.
- Electricity and regulation.
- Commissioning, cleaning, and validation.
VÊPRES thanks BENEQ and its teams for the trust placed in us and for the warm welcome extended to our project managers and technicians.
Cleanroom ISO 7
Equipment entry / roll-up door
Cleanroom ISO 5
ESD Environment
Cleanroom Access
Personnel and material airlocks
Technical area
Walkable Ceiling / Fresh Air Supply for the cleanroom
Cleanroom ISO 7
Area treated with autonomous filtration units and resin flooring
Addressing challenges
Despite the challenges posed by the language barrier, the distance from their Grenoble base, and Finnish regulations, the team successfully completed this project, marking one of VÊPRES's first major international ventures. Moreover, the project was executed during the Covid-19 pandemic, introducing additional organizational and management complexities. Nevertheless, VÊPRES delivered the cleanrooms a week ahead of schedule.
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