A robust and comprehensive technical solution, tailored to the complexity of our project
Construction of ISO 7 and ISO 5 cleanrooms at BENEQ in Finland.
Patrick RABINZOHN, Ph.D, Business Executive, Semiconductor ALD at BENEQ.
Manufacturer of advanced industrial equipment
BENEQ is based in Finland; why did you choose a French company?
Patrick RABINZOHN : For our rather complex project, we were seeking a company truly specialized in cleanrooms. We also consulted firms in Finland and elsewhere in Europe, but the candidates did not integrate this dimension into their core business.
Was VÊPRES chosen as the cleanroom specialist?
PR : Given our industrial objectives, we indeed sought a company that fully integrates cleanroom expertise, from initial study to final execution. The project presented numerous challenges, and from our initial meetings, the VÊPRES teams demonstrated a highly robust and comprehensive technical approach. This was very reassuring.
What were the Key Challenges?
PR : We were tasked with constructing approximately 500 m² of cleanrooms within older buildings (1980s). This space required accommodating a 300 m² ISO 7 cleanroom for our machine production and a 150 m² ISO 5 application and testing laboratory (client trials and demonstrations). All of this involved implementing circulation areas (airlocks, corridors, etc.) and installing technical equipment (air handling units, water, electricity, etc.). A truly complex project within a compact space, constrained by the existing building structure.
What activities are these cleanrooms designed for?
PR : Within its ALD division, led by Mr. Tommi VAINIO, BENEQ designs and manufactures machinery for industrial clients utilizing ALD (Atomic Layer Deposition) technology. We are primarily focused on the semiconductor market, addressing numerous sectors including electronics, optics, and energy. Consequently, the manufacturing and packaging conditions for our equipment are stringent (ISO 7 cleanrooms). We also need to test them or conduct client demonstrations, hence the requirement for an ISO 5 laboratory.
Was VÊPRES able to meet all your expectations, including adherence to deadlines?
PR : Initially scheduled for February 2020, the project commencement was delayed due to the health crisis. Although Finland was less affected than other countries, we had to postpone the start of work until June, with delivery anticipated by the end of November. However, commissioning was ultimately completed by the end of October, one month ahead of schedule.
A month in advance?
PR : Everything proceeded without any hitches. Despite the language barrier and the management of local subcontractors (at our request), the VÊPRES teams executed the project with exceptional proficiency. This is the advantage of collaborating with true specialists, capable of designing and delivering a turnkey cleanroom project.
Project for BENEQ in Finland
To learn more about the construction of 500 m² of ISO 7 and ISO 5 cleanrooms for an equipment manufacturer in the semiconductor industry.
A tailored solution
Following the completion of ISO 7 and ISO 5 cleanrooms at BENEQ in Finland, Patrick RABINZOHN discusses the choice of VÊPRES and the need to collaborate with a company that fully integrates cleanroom expertise, from design to execution.











